清华大学电子工程系微纳光电子学实验室欢迎您! 中文
Superconducting nanowire single photon detection system
Atomic Force Microscopy
UV Lithography Machine
Scanning Electron Microscopy
Gold Wire Ball-welding Machine
Plasma Enhanced Chemical Vapor Deposition
Inductive Coupled Plasma-Reactive Ion Etching
Fiber Drawing Machine
Magnetron Sputtering Machine
Auto Magnetron Sputtering Machine
Microtome Machine
Inductive Coupled Plasma
Step Profiler
Grinding Machine
Glove Box
Electric Fiber Coupling System
Electric Fiber Vertical Coupling System
Manual Fiber Coupling System
Low Temperature Vertical Coupling System
Optical Tweezer System